JPS60176751A - マスク - Google Patents
マスクInfo
- Publication number
- JPS60176751A JPS60176751A JP59032982A JP3298284A JPS60176751A JP S60176751 A JPS60176751 A JP S60176751A JP 59032982 A JP59032982 A JP 59032982A JP 3298284 A JP3298284 A JP 3298284A JP S60176751 A JPS60176751 A JP S60176751A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- film
- menplan
- pellicle
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title claims description 15
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 claims description 2
- 229940092714 benzenesulfonic acid Drugs 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 claims 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000020 Nitrocellulose Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59032982A JPS60176751A (ja) | 1984-02-23 | 1984-02-23 | マスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59032982A JPS60176751A (ja) | 1984-02-23 | 1984-02-23 | マスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60176751A true JPS60176751A (ja) | 1985-09-10 |
| JPH0374178B2 JPH0374178B2 (en]) | 1991-11-26 |
Family
ID=12374081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59032982A Granted JPS60176751A (ja) | 1984-02-23 | 1984-02-23 | マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60176751A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63185224U (en]) * | 1987-05-20 | 1988-11-29 | ||
| JPH02309A (ja) * | 1987-12-29 | 1990-01-05 | Canon Inc | Ｘ線用マスクとそれをを用いた露光方法 |
| JPH02310A (ja) * | 1987-12-29 | 1990-01-05 | Canon Inc | Ｘ線用マスクとそれを用いた露光方法 |
| JPH0652648A (ja) * | 1992-07-29 | 1994-02-25 | Mitsubishi Kasei Corp | 光記録媒体用カートリッジ |
-
1984
- 1984-02-23 JP JP59032982A patent/JPS60176751A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63185224U (en]) * | 1987-05-20 | 1988-11-29 | ||
| JPH02309A (ja) * | 1987-12-29 | 1990-01-05 | Canon Inc | Ｘ線用マスクとそれをを用いた露光方法 |
| JPH02310A (ja) * | 1987-12-29 | 1990-01-05 | Canon Inc | Ｘ線用マスクとそれを用いた露光方法 |
| JPH0652648A (ja) * | 1992-07-29 | 1994-02-25 | Mitsubishi Kasei Corp | 光記録媒体用カートリッジ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0374178B2 (en]) | 1991-11-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |